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TCO (Transparent Conductive Oxide) filmThe history and current situation of research and development, as well as the prospects for industrialization Traditional ITO thin films have excellent performance and are important materials for flat display devices The new ZnO thin film has low cost and great potential for development, and is expected to replace ITO (tin doped indium oxide) in the field of solar cells Multi element composite oxide thin films are one of the development directions of TCO; The application of flexible substrates has expanded the use of TCO films; The development of sol-gel preparation process promotes the practicability of large-area TCO films
Transparent conductive oxide filmTransparent conductive oxide (TCO) mainly includes oxides of In, Sb, Zn, and Cd and their composite multicomponent oxide thin film materials. At the same time, people have also developed multicomponent transparent oxide thin film materials such as Zn2SnO4, In4Sn2O12, MgIn2O4, CdIn2O4, etc There are many methods to prepare TCO thin films. Various methods to prepare TCO thin films, such as magnetron sputtering, reactive thermal evaporation, metal organic chemical vapor deposition, atomic layer epitaxy, jet thermal decomposition, pulsed laser deposition (physical vapor deposition), sol gel, etc. can be used to prepare TCO thin films The properties of thin films are determined by the preparation process
P-type transparent conductive film is a newly discovered material with broad potential applications in transparent active devices, sensors, transparent electrodes, and circuits Recently, some outstanding progress has been made in this area of research Research progress on p-type transparent conductive films in materials, deposition processes, and related devices
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